au.\*:("JURCZYK, Brian E")
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Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithographyTHOMPSON, Keith C; ANTONSEN, Erik L; HENDRICKS, Matthew R et al.Microelectronic engineering. 2006, Vol 83, Num 3, pp 476-484, issn 0167-9317, 9 p.Article
Reduction of ion energies from a multicomponent Z-pinch plasmaRUZIC, David N; THOMPSON, Keith C; JURCZYK, Brian E et al.IEEE transactions on plasma science. 2007, Vol 35, Num 3, pp 606-613, issn 0093-3813, 8 p.Article